Ti Interlayer Mediated Uniform NiGe Formation under Low-Temperature Microwave Annealing
نویسندگان
چکیده
The reactions between nickel and germanium are investigated by the incorporation of a titanium interlayer on (100) substrate. Under microwave annealing (MWA), germanide layers formed from 150 °C to 350 for 360 s in ambient nitrogen atmosphere. It is found that best quality achieved at °C. becomes cap layer after annealing. Increasing diffusion Ni MWA decreasing Ti ascribed induce uniform formation low temperature.
منابع مشابه
Performance Analysis of an Industrial Robot Under Uniform Temperature Change
The effect of temperature change on dynamic performances of an industrial robot with six axes of freedom is studied in this paper. In general, the strain and stress are produced not only by the external exciting force, but also by temperature change. The strain energy that is caused by temperatureThis paper describes how the temperature variation effects the dynamic performance of an indu...
متن کاملSchottky Barrier Height Tuning via the Dopant Segregation Technique through Low-Temperature Microwave Annealing
The Schottky junction source/drain structure has great potential to replace the traditional p/n junction source/drain structure of the future ultra-scaled metal-oxide-semiconductor field effect transistors (MOSFETs), as it can form ultimately shallow junctions. However, the effective Schottky barrier height (SBH) of the Schottky junction needs to be tuned to be lower than 100 meV in order to ob...
متن کاملLow-Temperature Annealing of ArsenidPhosphoms Junctions
The formation of arsenic and phosphorus junctions is an important process step in modern device fabrication. The accurate prediction of the vertical and lateral profile is crucial for optimization of the device behavior and reliability. Experimental data show that the damage from implantation of the dopant species has an important and controlling effect on the final profile during low-temperatu...
متن کاملA chirped-pulse Fourier-transform microwave/pulsed uniform flow spectrometer. I. The low-temperature flow system.
We report the development of a new instrument that combines chirped-pulse microwave spectroscopy with a pulsed uniform supersonic flow. This combination promises a nearly universal detection method that can deliver isomer and conformer specific, quantitative detection and spectroscopic characterization of unstable reaction products and intermediates, product vibrational distributions, and molec...
متن کاملRf and Microwave Annealing for Ultra-shallow Junction Formation
Next generation, 100 nm, devices require junctions shallower than 33 nm with sheet resistances less than 600 ohms/square. A new technique for annealing implanted dopants utilizes electromagnetic fields to induce current flow through the wafer. Ohmic collisions between high-energy electrons and the lattice rapidly heats the silicon; providing the energy necessary for dopant activation. Heating r...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Metals
سال: 2021
ISSN: ['2075-4701']
DOI: https://doi.org/10.3390/met11030488